HORIBA have developed a line-up of fluid control, vaporization, analytical equipment and measuring systems tailored to every stage of the semiconductor, FPD manufacturing process, and the other wide range of manufacturing process. In all stages, from materials evaluation through to final inspection, HORIBA products will help maintain high efficiency in your process.

Our products include Mass Flow Controllers and Mass Flow Meters including High Temperature Mass Flow and Liquid Mass Flow. Liquid Automatic Refill Systems, Liquid Vaporizers, Mixed Injection Systems and Gas Concentration Monitors.

Browse Semiconductor Divisions

  • Fluid Control

  • Browse Semiconductor Divisions

  • Dry Process Control

  • Wet Process Control

  • Metrology

Tel: +84-24-6683-1909