Gas Cabinets for 1, 2 or 3 cylinders

Valve Manifold Boxes (VMBs) for supplying multiple tools

Bulk Speciality Gas Systems (BSGS)

Gas Systems for various wafer production equipment

Customs designed R&D panels

Open, wall mounted systems (for inert gases)

1 cylinder cabinet, with purge gas from external source

2 cylinder cabinet

• 2 process gas cylinders, with purge gas from external source and automatic changeover

• 1 process gas cylinder, 1 purge gas cylinder

3 cylinder cabinet (2 × process + 1 × purge), with automatic changeover

Fully automatic control system with TouchScreen display

Automatic cycle purging

Cylinder pressure or cylinder weight monitoring

Pressure transducer for output pressure monitoring

Excess flow switch

Programmable cylinder pressure or weight limits for automatic changeover

External digital inputs and outputs

Multiple level password protection for various operation modes

Ethernet interface for LAN connection

Orbital welded gas panels, manufactured and assembled in the class 10/100 clean room

Tubing, fittings, valves, pressure regulators, filters, flow devices and MFCs with either metal face or butt weld connections, surface roughness Ra max 10 µinch or better

100 % helium leak test and functional test of all individual components prior to welding and panel assembly

Helium leak test after welding and panel assembly

Very low internal volume of the gas panel achieved by using special miniature weld heads

Compact internal vacuum generator for cycle purging

Tailored gas panel according to specific customer request

Pigtail purging manifold (“deep-purge”)

Monitoring of dangerous gas presence

Pressure monitoring in the coaxial tubing outer containment

Additional particle filtering and/or purifying of both process and purge gas

Analytical testing services and certification for particles, moisture, oxygen and total hydrocarbons