Moisture＜1 ppm, Oxygen＜1 ppm

Leakage Rate＜0.001 vol%/h

Clearroom：ISO-5, ISO-4

ISO-5 Glovebox (Built-in)

Parameters:

• Moisture<1 ppm

• Oxygen<1 ppm

• Leakage Rate<0.001 vol%/h

ISO-4 Gloveboxes

Parameters:

• Moisture<1 ppm

• Oxygen<1 ppm

• Leakage rate<0.001 vol%/h