10-10 Torr Ultimate vacuum

Substrate heating up to 1000˚C

HV and UHV available

Custom Design available

Fully Safety Interlocked

Single, multi-layer or co-deposition

Full automatic control system with touch screen display

Real time record system data (pressure, substrate temperature, deposition rate)

Real time process control to provide precise film quality and film reliability

Multiple levels of access with password protection

Choice of Turbo/Cryo/Diffusion Pump available

Extra spare port for OES, RGA or extra process monitoring

Substrate Size: up to 12”

Thickness uniformity: <±3%