Typ. RH

Accuracy(%RH) : 2%RH ; @0-100%RH

Typ. Temperature(°C)

0.2 °C ; @0-90 °C

Fully calibrated, linearized, and temperature compensated output.

Humidity-Temperature sensor can be installed inside the entire chambers optionally.

The Precision Humidity Controller consists of a humidity-temperature sensor, 2-channel MFCs, DI water bath, and software.

Nitrogen or air cylinder is required as a carrier gas to supply moisture.

Through feedback from the humidity-temperature sensor installed inside the chamber, one MFC supplies wet gas and the other supplies dry gas.

PID humidity control method is adopted for quick and precise humidity control.

It is useful to measure the electric property of a sample in gel-state or a polymer film.

Especially, the reliability of the measurement can be improved by one probe module because it can give a constant contact-pressure.

In addition, a uniform electric field by a guard ring improves the precision of the measurement.

It makes the measurement convenient to use a well-defined top electrode.

350 x 350 mm breadboard has a lightweight (only 2.3 kg) and can be conveniently mounted with options such as digital microscopes and external XYZ micro positioner module.