Micro Vacuum Probe System

DIMENSION :

70(W) x 140(L) x 31.5(H) mm

LOW WEIGHT :

650 ~ 950 gram

SMALL VOLUM :

100 CC

VACUUM :

10-3 mbar (with rotary pump)

10-6 mbar (with turbomolecular pump)

Temperature Ranges

Peltier Stage -40 ℃ ~ 200 ℃

Resistor Heater Stage RT ~ 750 ℃

Cryo Stage 80 K ~ 373 K

One Bond Head

Standard Model For the analysis of most electrical properties

4 Ch Probes

6 Ch Probes

8 Ch Probes

24 Pins LCC

48 Pins LCC

Unique Probing Method

Quick & Easy

A unique probe module is only 30x20x20 mm.

A stable contact is possible even on a 20x20 ㎛ contact pad.

As the probe module has a very flexible motion,

it smoothly follows the displacement of the contact point caused

by thermal expansion and maintains a stable contact.

Tel: +84-24-6683-1909

Email: contacts@amst.com.vn